专利内容由知识产权出版社提供
专利名称：NANOPARTICLE FORMATION MITIGATION
IN A DEPOSITION PROCESS
发明人：NEAL, James W.,HAZEL, Brian T.,LITTON,
David A.,JORZIK, Eric
申请号：EP18210142.8申请日：20151019公开号：EP3492625A1公开日：20190605
专利附图：
摘要：A system for depositing coating on a workpiece (22) includes a depositionchamber (26) within which is formed a vortex (130) to at least partially surround a
workpiece (22) therein.
申请人：United Technologies Corporation
地址：10 Farm Springs Road Farmington, CT 06032 US
国籍：US
代理机构：Dehns
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