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专利名称：High resolution objective lens assembly发明人：EDMUND W. ARRIOLA申请号：AU2003297669申请日：20031204
公开号：AU2003297669A8公开日：20040630
摘要：A high resolution objective lens assembly (20, 120, 220, 320) is implemented withrefractive lens elements made of modified fused silica for operation at deep ultraviolet(DUV) wavelengths to reduce birefringence-caused image aberrations. The high
resolution is achieved by an optical design that is characterized by a very high numericalaperture (NA) and short wavelength operation.
申请人：NEWPORT CORPORATION
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