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专利名称：COVER FOR A ROLLER
发明人：Mark Andreas,Joerg Kerschbaumer,Stefan
Schneider,Arno Zindel
申请号：US12502615申请日：20090714
公开号：US20100016136A1公开日：20100121
专利附图：
摘要：A cover for a roller having at least one roller () for transporting a substrate () ina deposition system and at least one cover means (), wherein the roller is retractableaway from the substrate and the cover means is adapted for at least partly covering the
retracted roller against contamination by a substance present in the deposition system.The cover for a roller has the advantage that the uptime of the deposition system isincreased.
申请人：Mark Andreas,Joerg Kerschbaumer,Stefan Schneider,Arno Zindel
地址：Wangs CH,Feldkirch AT,Valens CH,Maienfeld CH
国籍：CH,AT,CH,CH
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