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专利名称：Radiation shielding coating发明人：James A. O'Neil,Gary S. Ash申请号：US10339181申请日：20030108
公开号：US20040131478A1公开日：20040708
专利附图：
摘要：A vacuum conduit connected to a vacuum pump has a shield surface whichabsorbs radiation to reduce the total radiation falling on the vacuum pump. The vacuumsystem includes the vacuum conduit connected between a process chamber and thevacuum pump and a surface treatment along at least a portion of the shield surface
adapted to absorb radiation. Since the treatment is on the interior surface of the vacuumconduit and does not extend into the center of the conduit, gaseous flow to the pump isnot impeded. In this manner radiation entering the vacuum pump and falling on thecryogenic array is reduced without impeding gaseous flow to the cryogenic surface. Thesystem therefore minimizes the radiation load on the cryogenic array in the vacuumpump without impeding the gaseous flow through the vacuum pump.
申请人：HELIX TECHNOLOGY CORPORATION
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