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专利名称：INSPECTION APPARATUS
发明人：Shintaro Kasai,Takeaki Itsuji,Toshihiko Ouchi申请号：US12046907申请日：20080312
公开号：US20080224071A1公开日：20080918
专利附图：
摘要：The invention is to provide an inspection apparatus causing interactions of pluraltimes between an object and an electromagnetic wave, thereby enabling inspection with asatisfactory sensitivity even for an object of a trace amount. The inspection apparatusdetects information from an object 112 based on a change in an electromagnetic wave
transmission state caused by plural times of interactions between the electromagneticwave and the object 112. The inspection apparatus includes a transmission line 16, anelectromagnetic wave supplying and detecting unit 111 for supplying the transmissionline 16 with the electromagnetic wave and detecting the electromagnetic wave, areflection unit 110 for reflecting the electromagnetic wave transmitting through thetransmission line 16, and an inspection unit 113 for placing the object 112 between theelectromagnetic wave supplying and detecting unit 111 and the reflection unit 110,wherein the transmission line 16, the reflection unit 110 and the inspection unit 113 areformed on a same substrate 11.
申请人：Shintaro Kasai,Takeaki Itsuji,Toshihiko Ouchi
地址：Tokyo JP,Hiratsuka-shi JP,Sagamihara-shi JP
国籍：JP,JP,JP
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