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专利名称：METHODS OF FORMING LAYERS发明人：Philip George Pitcher,Edwin Frank
Rejda,Richard Thomas Greenlee
申请号：US13440068申请日：20120405
公开号：US201301453A1公开日：20130627
专利附图：
摘要：A method of forming a layer, the method including providing a substrate havingat least one surface adapted for forming a layer thereon; directing a particle beamtowards the surface of the substrate, the particle beam including particles, wherein the
particle beam has an angle of incidence with respect to the substrate, and is configuredso that the particles have implant energies that are not greater than about 100 eV;changing the angle of incidence of the particle beam, the implant energy of the particles,or a combination thereof; and directing the particle beam towards the surface of thesubstrate a subsequent time, wherein the particles of the particle beam form a layer onthe substrate.
申请人：Philip George Pitcher,Edwin Frank Rejda,Richard Thomas Greenlee
地址：Shakopee MN US,Bloomington MN US,Hastings MN US
国籍：US,US,US
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