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专利名称：MULTI MODE INSPECTION METHOD AND
APPARATUS
发明人：FURMAN, Dov,DOTAN, Noam,MIKLATZKY,
Efraim
申请号：EP05757570.6申请日：20050704公开号：EP1766363A2公开日：20070328
摘要：An inspection system for inspecting an object, the system comprising anilluminator including at least one pulsed light source, a detector assembly, and a relativemotion provider operative to provide motion of the object relative to the detectorassembly, along an axis of motion, the detector assembly comprising a plurality of 2-dimensional detector units whose active areas are arranged at intervals.
申请人：Negevtech Ltd.
地址：12 Hamada Street Rehovot 76701 IL
国籍：IL
代理机构：Frost, Alex John
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